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Title Fully Differential ROIC for SNR Enhancement by using a MEMS Microphone Pair with a Differential AC Bias and a High-voltage DC Bias
Authors (Yoon-Jee Kim) ; (Jaehyun Park) ; (Byungsub Kim) ; (Jae-Yoon Sim) ; (Hong-June Park)
DOI https://doi.org/10.5573/IEIESPC.2020.9.10.405
Page pp.405-412
ISSN 2287-5255
Keywords MEMS microphone; ROIC; Low-noise amplifier; Chopper stabilization technique; Signal-to-noise ratio
Abstract A fully differential readout integrated circuit (ROIC) is proposed to enhance SNR by using a micro electro mechanical system (MEMS) microphone pair. A differential clock is AC-coupled to the MEMS microphone pair as AC bias for chopper operation, while maintaining a high-voltage DC bias through high-resistance resistors for high sensitivity. The MEMS microphone pair connected to the fully differential ROIC amplifier with a demodulation chopper increased the measured SNRAW by 3.5~4.3dB compared to a single MEMS microphone with a chopper. The chopper operation applied to the pair of MEMS microphones reduced the measured audio band noise at the ROIC output by 14.8~16.5 times, compared to the no-chopper case. The fully differential ROIC consists of an amplifier, a demodulation chopper, a pair of resistor-capacitor low pass filters (RC-LPFs) and a unity-gain buffer. The ROIC implemented in a 0.35μm CMOS process takes a chip area of 2.5mm2 and consumes 134μA at a supply voltage of 3.3V.